Electric-driven flexible-roller nanoimprint lithography on the stress-sensitive warped wafer

Electric-driven flexible-roller nanoimprint lithography on the stress-sensitive warped wafer

Surface nanopatterning of semiconductor optoelectronic devices is a powerful way to improve their quality and performance. However, photoelectric devices’ inherent stress sensitivity and inevitable warpage pose a huge challenge on fabricating nanostructures large-scale. Electric-driven flexible-roll...

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Bibliographic Details
Main Authors: Yu Fan, Chunhui Wang, Jiaxing Sun, Xiaogang Peng, Hongmiao Tian, Xiangming Li, Xiaoliang Chen, Xiaoming Chen, Jinyou Shao
Format: Article
Language:English
Published: IOP Publishing 2023-01-01
Series:International Journal of Extreme Manufacturing
Subjects:
nanoimprinting
electric-driven
flexible-roller
warped
stress-sensitive
Online Access:https://doi.org/10.1088/2631-7990/acd827

Internet

https://doi.org/10.1088/2631-7990/acd827

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