A Miniaturised, Fully Integrated NDIR CO<sub>2</sub> Sensor On-Chip
In this paper, we present a fully integrated Non-dispersive Infrared (NDIR) CO<sub>2</sub> sensor implemented on a silicon chip. The sensor is based on an integrating cylinder with access waveguides. A mid-IR LED is used as the optical source, and two mid-IR photodiodes are used as detec...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-08-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/21/16/5347 |