A Miniaturised, Fully Integrated NDIR CO<sub>2</sub> Sensor On-Chip
In this paper, we present a fully integrated Non-dispersive Infrared (NDIR) CO<sub>2</sub> sensor implemented on a silicon chip. The sensor is based on an integrating cylinder with access waveguides. A mid-IR LED is used as the optical source, and two mid-IR photodiodes are used as detec...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-08-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/16/5347 |
| _version_ | 1797522064051011584 |
|---|---|
| author | Xiaoning Jia Joris Roels Roel Baets Gunther Roelkens |
| author_facet | Xiaoning Jia Joris Roels Roel Baets Gunther Roelkens |
| author_sort | Xiaoning Jia |
| collection | DOAJ |
| description | In this paper, we present a fully integrated Non-dispersive Infrared (NDIR) CO<sub>2</sub> sensor implemented on a silicon chip. The sensor is based on an integrating cylinder with access waveguides. A mid-IR LED is used as the optical source, and two mid-IR photodiodes are used as detectors. The fully integrated sensor is formed by wafer bonding of two silicon substrates. The fabricated sensor was evaluated by performing a CO<sub>2</sub> concentration measurement, showing a limit of detection of ∼750 ppm. The cross-sensitivity of the sensor to water vapor was studied both experimentally and numerically. No notable water interference was observed in the experimental characterizations. Numerical simulations showed that the transmission change induced by water vapor absorption is much smaller than the detection limit of the sensor. A qualitative analysis on the long term stability of the sensor revealed that the long term stability of the sensor is subject to the temperature fluctuations in the laboratory. The use of relatively cheap LED and photodiodes bare chips, together with the wafer-level fabrication process of the sensor provides the potential for a low cost, highly miniaturized NDIR CO<sub>2</sub> sensor. |
| first_indexed | 2024-03-10T08:24:16Z |
| format | Article |
| id | doaj.art-3d635c2954ee42999af7581d48660db2 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T08:24:16Z |
| publishDate | 2021-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-3d635c2954ee42999af7581d48660db22023-11-22T09:38:11ZengMDPI AGSensors1424-82202021-08-012116534710.3390/s21165347A Miniaturised, Fully Integrated NDIR CO<sub>2</sub> Sensor On-ChipXiaoning Jia0Joris Roels1Roel Baets2Gunther Roelkens3Photonics Research Group, INTEC, Ghent University-Imec, Technologiepark 126, 9052 Gent, BelgiumMelexis Technologies NV, Transportstraat 1, 3980 Tessenderlo, BelgiumPhotonics Research Group, INTEC, Ghent University-Imec, Technologiepark 126, 9052 Gent, BelgiumPhotonics Research Group, INTEC, Ghent University-Imec, Technologiepark 126, 9052 Gent, BelgiumIn this paper, we present a fully integrated Non-dispersive Infrared (NDIR) CO<sub>2</sub> sensor implemented on a silicon chip. The sensor is based on an integrating cylinder with access waveguides. A mid-IR LED is used as the optical source, and two mid-IR photodiodes are used as detectors. The fully integrated sensor is formed by wafer bonding of two silicon substrates. The fabricated sensor was evaluated by performing a CO<sub>2</sub> concentration measurement, showing a limit of detection of ∼750 ppm. The cross-sensitivity of the sensor to water vapor was studied both experimentally and numerically. No notable water interference was observed in the experimental characterizations. Numerical simulations showed that the transmission change induced by water vapor absorption is much smaller than the detection limit of the sensor. A qualitative analysis on the long term stability of the sensor revealed that the long term stability of the sensor is subject to the temperature fluctuations in the laboratory. The use of relatively cheap LED and photodiodes bare chips, together with the wafer-level fabrication process of the sensor provides the potential for a low cost, highly miniaturized NDIR CO<sub>2</sub> sensor.https://www.mdpi.com/1424-8220/21/16/5347optical sensorCO<sub>2</sub> sensorNDIRsilicon photonics |
| spellingShingle | Xiaoning Jia Joris Roels Roel Baets Gunther Roelkens A Miniaturised, Fully Integrated NDIR CO<sub>2</sub> Sensor On-Chip Sensors optical sensor CO<sub>2</sub> sensor NDIR silicon photonics |
| title | A Miniaturised, Fully Integrated NDIR CO<sub>2</sub> Sensor On-Chip |
| title_full | A Miniaturised, Fully Integrated NDIR CO<sub>2</sub> Sensor On-Chip |
| title_fullStr | A Miniaturised, Fully Integrated NDIR CO<sub>2</sub> Sensor On-Chip |
| title_full_unstemmed | A Miniaturised, Fully Integrated NDIR CO<sub>2</sub> Sensor On-Chip |
| title_short | A Miniaturised, Fully Integrated NDIR CO<sub>2</sub> Sensor On-Chip |
| title_sort | miniaturised fully integrated ndir co sub 2 sub sensor on chip |
| topic | optical sensor CO<sub>2</sub> sensor NDIR silicon photonics |
| url | https://www.mdpi.com/1424-8220/21/16/5347 |
| work_keys_str_mv | AT xiaoningjia aminiaturisedfullyintegratedndircosub2subsensoronchip AT jorisroels aminiaturisedfullyintegratedndircosub2subsensoronchip AT roelbaets aminiaturisedfullyintegratedndircosub2subsensoronchip AT guntherroelkens aminiaturisedfullyintegratedndircosub2subsensoronchip AT xiaoningjia miniaturisedfullyintegratedndircosub2subsensoronchip AT jorisroels miniaturisedfullyintegratedndircosub2subsensoronchip AT roelbaets miniaturisedfullyintegratedndircosub2subsensoronchip AT guntherroelkens miniaturisedfullyintegratedndircosub2subsensoronchip |