A Miniaturised, Fully Integrated NDIR CO<sub>2</sub> Sensor On-Chip

A Miniaturised, Fully Integrated NDIR CO<sub>2</sub> Sensor On-Chip

In this paper, we present a fully integrated Non-dispersive Infrared (NDIR) CO<sub>2</sub> sensor implemented on a silicon chip. The sensor is based on an integrating cylinder with access waveguides. A mid-IR LED is used as the optical source, and two mid-IR photodiodes are used as detec...

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Bibliographic Details
Main Authors: Xiaoning Jia, Joris Roels, Roel Baets, Gunther Roelkens
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Sensors
Subjects:
optical sensor
CO<sub>2</sub> sensor
NDIR
silicon photonics
Online Access:https://www.mdpi.com/1424-8220/21/16/5347

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