Current Drops in CF<sub>4</sub> Plasma-Treated AlGaN/GaN Heterojunction in Polar Gas Ambient

Current Drops in CF<sub>4</sub> Plasma-Treated AlGaN/GaN Heterojunction in Polar Gas Ambient

This letter reports the phenomenon of current drops in an AlGaN/GaN heterojunction with CF<sub>4</sub> plasma treated in a polar gas ambient. Ungated AlGaN/GaN HEMT with CF<sub>4</sub> plasma treatment was tested in ethanol, acetonitrile, and an acetic acid gas ambient, and t...

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Bibliographic Details
Main Authors: Ying Ma, Liang Chen, Zhihua Dong, Yifang Hong, Yang Xiao, Yijie Xin, Bin Zhang, Hua Qin, Ting Zhang, Xiaodong Zhang, Guohao Yu, Zhiqun Cheng, Lingfeng Mao, Yong Cai
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Electronics
Subjects:
AlGaN/GaN heterojunction
CF<sub>4</sub> plasma
polar gas ambient
Online Access:https://www.mdpi.com/2079-9292/12/8/1809

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https://www.mdpi.com/2079-9292/12/8/1809

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