A Closed-Loop Micro-Ultrasonic Motor Control System With Extremum Seeking
Microactuators are an essential technology to revolutionize existing micromachines, but making them closed-loop controlled with an internal sensor is a great challenge due to the limited size of the components. In this paper, we build a micro-ultrasonic motor in the 2–3 mm scale, combine...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2023-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10058517/ |