Single pulse laser removal of indium tin oxide film on glass and polyethylene terephthalate by nanosecond and femtosecond laser
Indium tin oxide (ITO) is the most important transparent conducting electrode to date and the candidate for ultrafast signal processing in telecommunication region. ITO is normally selectively removed in a multiple-steps process for device application. In this work, we aimed to study single pulse re...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2020-12-01
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| Series: | Nanotechnology Reviews |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/ntrev-2020-0115 |