A CMOS-MEMS Pixel Sensor for Thermal Neutron Imaging
A monolithic pixel sensor with high spatial granularity (35 × 40 μm<sup>2</sup>) is presented, aiming at thermal neutron detection and imaging. The device is made using the CMOS SOIPIX technology, with Deep Reactive-Ion Etching post-processing on the backside to obtain high aspect-ratio...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-04-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/5/952 |