Effect of Nitrogen Flow Rate on Structure and Adhesion Strength of Magnetron Sputtered Ti-Si-N Nanocomposite Films
Ti-Si-N nanocomposite films were prepared by co-sputtering Ti and Si targets in Ar/N2 gas atmosphere. The effect of N2 flow rate on the structure, adhesion strength and friction coefficient of the deposited films was studied by using X-ray diffraction, atom force microscope, field emission scanning...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2016-01-01
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| Series: | MATEC Web of Conferences |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20166704015 |