Hardness, Young’s Modulus and Elastic Recovery in Magnetron Sputtered Amorphous AlMgB<sub>14</sub> Films
We report optical and mechanical properties of hard aluminum magnesium boride films magnetron sputtered from a stoichiometric AlMgB<sub>14</sub> ceramic target onto Corning<sup>®</sup> 1737 Glass and Si (100) wafers. High target sputtering rf-power and sufficiently short targ...
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-09-01
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| Series: | Crystals |
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| Online Access: | https://www.mdpi.com/2073-4352/10/9/823 |