Nondegenerate Polycrystalline Hydrogen-Doped Indium Oxide (InO<i><sub>x</sub></i>:H) Thin Films Formed by Low-Temperature Solid-Phase Crystallization for Thin Film Transistors

Nondegenerate Polycrystalline Hydrogen-Doped Indium Oxide (InO<i><sub>x</sub></i>:H) Thin Films Formed by Low-Temperature Solid-Phase Crystallization for Thin Film Transistors

We successfully demonstrated a transition from a metallic InO<i><sub>x</sub></i> film into a nondegenerate semiconductor InO<i><sub>x</sub></i>:H film. A hydrogen-doped amorphous InO<i><sub>x</sub></i>:H (a-InO<i><sub&g...

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Bibliographic Details
Main Authors: Taiki Kataoka, Yusaku Magari, Hisao Makino, Mamoru Furuta
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Materials
Subjects:
indium oxide
thin film transistor
solid-phase crystallization
metal–insulator transition
Online Access:https://www.mdpi.com/1996-1944/15/1/187

Internet

https://www.mdpi.com/1996-1944/15/1/187

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