Sub-10 nm Scalability of Junctionless FETs Using a Ground Plane in High-K BOX: A Simulation Study

The leakage mechanisms of inefficient volume depletion and lateral band to band tunneling (L-BTBT) restrict the scaling of SOI-junctionless (JL) FETs. Therefore, in this article, we investigate the scalability of the SOI-JLFETs by incorporating a ground plane (GP) inside a high-K buried oxide (BOX)....

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Main Authors: Aakash Kumar Jain, Mamidala Jagadesh Kumar
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9151116/
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author Aakash Kumar Jain
Mamidala Jagadesh Kumar
author_facet Aakash Kumar Jain
Mamidala Jagadesh Kumar
author_sort Aakash Kumar Jain
collection DOAJ
description The leakage mechanisms of inefficient volume depletion and lateral band to band tunneling (L-BTBT) restrict the scaling of SOI-junctionless (JL) FETs. Therefore, in this article, we investigate the scalability of the SOI-JLFETs by incorporating a ground plane (GP) inside a high-K buried oxide (BOX). Using calibrated 2-D simulations, it is demonstrated that a SOI-JLFET with the ground plane placed at a shallow depth within the high-K dielectric BOX not only assists in the efficient volume depletion of the channel but also results in a drastically reduced L-BTBT action. The efficient volume depletion, therefore, relaxes the constraints of ultra-thin silicon body for SOI-JLFET and circumvents the need of complex device architectures for achieving the same. Also, the depletion of the drain and source regions jointly results in a drastically reduced L-BTBT induced parasitic BJT action in the OFF-state and in the negative bias regime. The simultaneous suppression of both the leakage mechanisms results in an overall leakage current reduction leading to a significant ON-state to OFF-state current ratio (ION/IOFF) of 106 and 105 even at the scaled gate length of 10 nm and 7 nm, respectively. Additionally, a significant reduction in the drain-induced barrier lowering and threshold voltage roll-off is observed in a GP-JLFET. The GP-JLFET also exhibits an appreciable ION/IOFF ratio under the influence of process variations of doping and film thickness without any considerable degradation in the performance. Thus, the suppressed leakage mechanisms and short channel effects in the proposed device provide an incentive for realizing the SOI-JLFETs in the sub-10 nm regime for low power and low-leakage applications.
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spelling doaj.art-3e675eae46094318a3bc86baf4a3b6122022-12-21T21:27:12ZengIEEEIEEE Access2169-35362020-01-01813754013754810.1109/ACCESS.2020.30125799151116Sub-10 nm Scalability of Junctionless FETs Using a Ground Plane in High-K BOX: A Simulation StudyAakash Kumar Jain0https://orcid.org/0000-0001-7529-6625Mamidala Jagadesh Kumar1https://orcid.org/0000-0001-6657-1277National University of Singapore, SingaporeIndian Institute of Technology Delhi, New Delhi, IndiaThe leakage mechanisms of inefficient volume depletion and lateral band to band tunneling (L-BTBT) restrict the scaling of SOI-junctionless (JL) FETs. Therefore, in this article, we investigate the scalability of the SOI-JLFETs by incorporating a ground plane (GP) inside a high-K buried oxide (BOX). Using calibrated 2-D simulations, it is demonstrated that a SOI-JLFET with the ground plane placed at a shallow depth within the high-K dielectric BOX not only assists in the efficient volume depletion of the channel but also results in a drastically reduced L-BTBT action. The efficient volume depletion, therefore, relaxes the constraints of ultra-thin silicon body for SOI-JLFET and circumvents the need of complex device architectures for achieving the same. Also, the depletion of the drain and source regions jointly results in a drastically reduced L-BTBT induced parasitic BJT action in the OFF-state and in the negative bias regime. The simultaneous suppression of both the leakage mechanisms results in an overall leakage current reduction leading to a significant ON-state to OFF-state current ratio (ION/IOFF) of 106 and 105 even at the scaled gate length of 10 nm and 7 nm, respectively. Additionally, a significant reduction in the drain-induced barrier lowering and threshold voltage roll-off is observed in a GP-JLFET. The GP-JLFET also exhibits an appreciable ION/IOFF ratio under the influence of process variations of doping and film thickness without any considerable degradation in the performance. Thus, the suppressed leakage mechanisms and short channel effects in the proposed device provide an incentive for realizing the SOI-JLFETs in the sub-10 nm regime for low power and low-leakage applications.https://ieeexplore.ieee.org/document/9151116/Band-to-band tunneling (BTBT)gate induced drain leakage (GIDL)Junctionless FET (JLFET)parasitic bipolar junction transistor (BJT)drain induced barrier lowering (DIBL)
spellingShingle Aakash Kumar Jain
Mamidala Jagadesh Kumar
Sub-10 nm Scalability of Junctionless FETs Using a Ground Plane in High-K BOX: A Simulation Study
IEEE Access
Band-to-band tunneling (BTBT)
gate induced drain leakage (GIDL)
Junctionless FET (JLFET)
parasitic bipolar junction transistor (BJT)
drain induced barrier lowering (DIBL)
title Sub-10 nm Scalability of Junctionless FETs Using a Ground Plane in High-K BOX: A Simulation Study
title_full Sub-10 nm Scalability of Junctionless FETs Using a Ground Plane in High-K BOX: A Simulation Study
title_fullStr Sub-10 nm Scalability of Junctionless FETs Using a Ground Plane in High-K BOX: A Simulation Study
title_full_unstemmed Sub-10 nm Scalability of Junctionless FETs Using a Ground Plane in High-K BOX: A Simulation Study
title_short Sub-10 nm Scalability of Junctionless FETs Using a Ground Plane in High-K BOX: A Simulation Study
title_sort sub 10 nm scalability of junctionless fets using a ground plane in high k box a simulation study
topic Band-to-band tunneling (BTBT)
gate induced drain leakage (GIDL)
Junctionless FET (JLFET)
parasitic bipolar junction transistor (BJT)
drain induced barrier lowering (DIBL)
url https://ieeexplore.ieee.org/document/9151116/
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