Synthesis and electrical characterization of intrinsic and in situ doped Si nanowires using a novel precursor

Synthesis and electrical characterization of intrinsic and in situ doped Si nanowires using a novel precursor

Perchlorinated polysilanes were synthesized by polymerization of tetrachlorosilane under cold plasma conditions with hydrogen as a reducing agent. Subsequent selective cleavage of the resulting polymer yielded oligochlorosilanes SinCl2n+2 (n = 2, 3) from which the octachlorotrisilane (n = 3, Cl8Si3,...

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Bibliographic Details
Main Authors: Wolfgang Molnar, Alois Lugstein, Tomasz Wojcik, Peter Pongratz, Norbert Auner, Christian Bauch, Emmerich Bertagnolli
Format: Article
Language:English
Published: Beilstein-Institut 2012-07-01
Series:Beilstein Journal of Nanotechnology
Subjects:
chemical vapour deposition
field-effect transistor
oligosilanes
radiation-induced nanostructures
silicon nanowires
vapor–liquid–solid mechanism
Online Access:https://doi.org/10.3762/bjnano.3.65

Internet

https://doi.org/10.3762/bjnano.3.65

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