Optical Method to Determine the Orientation of Monocrystalline Silicon Wafers
In this work, an optical method was used for the determination of thecrystalline orientation of the chemically etched silicon surfaces in the (111),(110) and (100) planes. This method depends on the light patterns of laserbeam reflected from the monocrystalline surfaces. The optical method submitsac...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Unviversity of Technology- Iraq
2007-10-01
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| Series: | Engineering and Technology Journal |
| Subjects: | |
| Online Access: | https://etj.uotechnology.edu.iq/article_25936_a50a8715cf3a4b7727b4005dd88a4bb5.pdf |