Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment

Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment

A brief review of methods for increasing the diffraction efficiency of optical elements synthesized by direct laser writing is done. It is noted that the previously proposed methods for recording the topology of similar elements using volumetric or surface contour masks do not provide an ultimate so...

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Bibliographic Details
Main Authors: V.P. Kiryanov, N.A. Gurin
Format: Article
Language:English
Published: Samara National Research University 2023-04-01
Series:Компьютерная оптика
Subjects:
diffractive optical elements
diffraction efficiency
direct laser record
optical technologies
Online Access:https://computeroptics.ru/eng/KO/Annot/KO47-2/470206e.html

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https://computeroptics.ru/eng/KO/Annot/KO47-2/470206e.html

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