Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment
A brief review of methods for increasing the diffraction efficiency of optical elements synthesized by direct laser writing is done. It is noted that the previously proposed methods for recording the topology of similar elements using volumetric or surface contour masks do not provide an ultimate so...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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Samara National Research University
2023-04-01
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| Series: | Компьютерная оптика |
| Subjects: | |
| Online Access: | https://computeroptics.ru/eng/KO/Annot/KO47-2/470206e.html |
| _version_ | 1797363937307525120 |
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| author | V.P. Kiryanov N.A. Gurin |
| author_facet | V.P. Kiryanov N.A. Gurin |
| author_sort | V.P. Kiryanov |
| collection | DOAJ |
| description | A brief review of methods for increasing the diffraction efficiency of optical elements synthesized by direct laser writing is done. It is noted that the previously proposed methods for recording the topology of similar elements using volumetric or surface contour masks do not provide an ultimate solution to a problem of increasing the diffraction efficiency. The performed model and physical experiments on the fabrication of structures of surface-relief phase optical elements by recording zone profiles using oblique laser beams show the fundamental possibility of forming steep side walls of the reverse zone slopes and the feasibility of developing this technology based on laser image generators. |
| first_indexed | 2024-03-08T16:28:09Z |
| format | Article |
| id | doaj.art-3ef317d247ca41d884b1842310edab08 |
| institution | Directory Open Access Journal |
| issn | 0134-2452 2412-6179 |
| language | English |
| last_indexed | 2024-03-08T16:28:09Z |
| publishDate | 2023-04-01 |
| publisher | Samara National Research University |
| record_format | Article |
| series | Компьютерная оптика |
| spelling | doaj.art-3ef317d247ca41d884b1842310edab082024-01-06T10:54:39ZengSamara National Research UniversityКомпьютерная оптика0134-24522412-61792023-04-0147223524510.18287/2412-6179-CO-1161Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experimentV.P. Kiryanov0N.A. Gurin1Institute of Automation and Electrometry of the Siberian Branch of the Russian Academy of SciencesInstitute of Automation and Electrometry of the Siberian Branch of the Russian Academy of Sciences; SC "Novosibirsk Instrument-Making Plant"A brief review of methods for increasing the diffraction efficiency of optical elements synthesized by direct laser writing is done. It is noted that the previously proposed methods for recording the topology of similar elements using volumetric or surface contour masks do not provide an ultimate solution to a problem of increasing the diffraction efficiency. The performed model and physical experiments on the fabrication of structures of surface-relief phase optical elements by recording zone profiles using oblique laser beams show the fundamental possibility of forming steep side walls of the reverse zone slopes and the feasibility of developing this technology based on laser image generators.https://computeroptics.ru/eng/KO/Annot/KO47-2/470206e.htmldiffractive optical elementsdiffraction efficiencydirect laser recordoptical technologies |
| spellingShingle | V.P. Kiryanov N.A. Gurin Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment Компьютерная оптика diffractive optical elements diffraction efficiency direct laser record optical technologies |
| title | Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment |
| title_full | Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment |
| title_fullStr | Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment |
| title_full_unstemmed | Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment |
| title_short | Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment |
| title_sort | improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams modeling and experiment |
| topic | diffractive optical elements diffraction efficiency direct laser record optical technologies |
| url | https://computeroptics.ru/eng/KO/Annot/KO47-2/470206e.html |
| work_keys_str_mv | AT vpkiryanov improvingthediffractionefficiencyofstructuresindirectlaserwritingusingobliquelyincidentbeamsmodelingandexperiment AT nagurin improvingthediffractionefficiencyofstructuresindirectlaserwritingusingobliquelyincidentbeamsmodelingandexperiment |