Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment
A brief review of methods for increasing the diffraction efficiency of optical elements synthesized by direct laser writing is done. It is noted that the previously proposed methods for recording the topology of similar elements using volumetric or surface contour masks do not provide an ultimate so...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Samara National Research University
2023-04-01
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| Series: | Компьютерная оптика |
| Subjects: | |
| Online Access: | https://computeroptics.ru/eng/KO/Annot/KO47-2/470206e.html |