High-efficiency focusing and imaging by dielectric kinoform zone plate lenses with soft X-rays

High-efficiency focusing and imaging by dielectric kinoform zone plate lenses with soft X-rays

With fast advances in enhancing the focusing/imaging resolution of Fresnel zone plate lenses toward sub-10 nm, low diffraction efficiency in connection with their rectangular zone shape still remains a big issue in both soft and hard X-ray microscopy. In hard X-ray optics, encouraging progress has r...

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Bibliographic Details
Main Authors: Xujie Tong, Yifang Chen, Zijian Xu, Yijie Li, Zhenjiang Xing, Chengyang Mu, Jun Zhao, Xiangjun Zhen, Chengwen Mao, Renzhong Tai
Format: Article
Language:English
Published: International Union of Crystallography 2023-03-01
Series:Journal of Synchrotron Radiation
Subjects:
dielectric kinoform zone plate lens
greyscale electron beam lithography
high-efficiency focusing by soft x-rays
x-ray microscopy
Online Access:http://scripts.iucr.org/cgi-bin/paper?S1600577522012115

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http://scripts.iucr.org/cgi-bin/paper?S1600577522012115

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