The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

This treatise studies a microoptoelectromechanical accelerometer (MOEMA) with an optical measuring transducer built according to the optical tunneling principle (evanescent coupling). The work discusses the design of the accelerometer’s microelectromechanical sensing element (MSE) and states the req...

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Bibliographic Details
Main Authors: Evgenii Barbin, Tamara Nesterenko, Aleksej Koleda, Evgeniy Shesterikov, Ivan Kulinich, Andrey Kokolov, Anton Perin
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Sensors
Subjects:
microoptoelectromechanical accelerometer
tunneling effect
evanescent coupling
proof mass
waveguides
microoptoelectromechanical sensing element
Online Access:https://www.mdpi.com/1424-8220/24/3/765

Internet

https://www.mdpi.com/1424-8220/24/3/765

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