Voigt Size-Strain Broadening Of Pd Thin Films
Pd thin films were deposited onto Si (100) and glass/Pd/etching substrates by means of r.f. reactive sputtering under the same sputtering condition in order to appreciate the influence of substrate structure. The aim of this study was to appreciate the main X-ray diffraction line profile characteris...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
VSB-Technical University of Ostrava
2004-01-01
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| Series: | Advances in Electrical and Electronic Engineering |
| Subjects: | |
| Online Access: | http://advances.utc.sk/index.php/AEEE/article/view/441 |