Nonlinear Dynamic Analysis of an Electrostatically Actuated Clamped–Clamped Beam and Excited at the Primary and Secondary Resonances
This work investigates the primary and secondary resonances of an electrostatically excited double-clamped microbeam and its feasibility to be used for sensing applications. The sensor design can be excited directly in the vicinity of the primary and secondary resonances. This excitation mechanism w...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-10-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/10/1972 |