Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO<sub>2</sub> Laser

Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO<sub>2</sub> Laser

A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO<sub>2</sub> laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermeti...

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Bibliographic Details
Main Authors: Hui Zhang, Yi Li, Zhuo Zhang, Chaoming Yang, Mingshan Liang, Yong Hu, Heming Wei, Fufei Pang
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Sensors
Subjects:
optical fiber sensor
Fabry–Pérot cavity
pressure sensing
CO<sub>2</sub> laser welding
Online Access:https://www.mdpi.com/1424-8220/22/13/4700

Internet

https://www.mdpi.com/1424-8220/22/13/4700

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