Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO<sub>2</sub> Laser
A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO<sub>2</sub> laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermeti...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-06-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/22/13/4700 |
| _version_ | 1827625366168010752 |
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| author | Hui Zhang Yi Li Zhuo Zhang Chaoming Yang Mingshan Liang Yong Hu Heming Wei Fufei Pang |
| author_facet | Hui Zhang Yi Li Zhuo Zhang Chaoming Yang Mingshan Liang Yong Hu Heming Wei Fufei Pang |
| author_sort | Hui Zhang |
| collection | DOAJ |
| description | A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO<sub>2</sub> laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for pressure sensing. The fabricated FP cavity has a fringe contrast larger than 15 dB. The experimental results show that the fabricated device has a linear response to the change in pressure, with a sensitivity of −2.02 nm/MPa in the range of 0 to 4 MPa. The results demonstrate that the proposed fabrication technique can be used for fabricating optical fiber microcavities for sensing applications. |
| first_indexed | 2024-03-09T12:35:44Z |
| format | Article |
| id | doaj.art-3fbb74113d2d423abc73cea83c80344b |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T12:35:44Z |
| publishDate | 2022-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-3fbb74113d2d423abc73cea83c80344b2023-11-30T22:24:32ZengMDPI AGSensors1424-82202022-06-012213470010.3390/s22134700Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO<sub>2</sub> LaserHui Zhang0Yi Li1Zhuo Zhang2Chaoming Yang3Mingshan Liang4Yong Hu5Heming Wei6Fufei Pang7Xi’an Modern Control Technology Research Institute, Xi’an 710065, ChinaXi’an Modern Control Technology Research Institute, Xi’an 710065, ChinaXi’an Modern Control Technology Research Institute, Xi’an 710065, ChinaXi’an Modern Control Technology Research Institute, Xi’an 710065, ChinaXi’an Modern Control Technology Research Institute, Xi’an 710065, ChinaKey Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, ChinaKey Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, ChinaKey Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, ChinaA diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO<sub>2</sub> laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for pressure sensing. The fabricated FP cavity has a fringe contrast larger than 15 dB. The experimental results show that the fabricated device has a linear response to the change in pressure, with a sensitivity of −2.02 nm/MPa in the range of 0 to 4 MPa. The results demonstrate that the proposed fabrication technique can be used for fabricating optical fiber microcavities for sensing applications.https://www.mdpi.com/1424-8220/22/13/4700optical fiber sensorFabry–Pérot cavitypressure sensingCO<sub>2</sub> laser welding |
| spellingShingle | Hui Zhang Yi Li Zhuo Zhang Chaoming Yang Mingshan Liang Yong Hu Heming Wei Fufei Pang Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO<sub>2</sub> Laser Sensors optical fiber sensor Fabry–Pérot cavity pressure sensing CO<sub>2</sub> laser welding |
| title | Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO<sub>2</sub> Laser |
| title_full | Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO<sub>2</sub> Laser |
| title_fullStr | Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO<sub>2</sub> Laser |
| title_full_unstemmed | Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO<sub>2</sub> Laser |
| title_short | Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO<sub>2</sub> Laser |
| title_sort | hermetic welding of an optical fiber fabry perot cavity for a diaphragm based pressure sensor using co sub 2 sub laser |
| topic | optical fiber sensor Fabry–Pérot cavity pressure sensing CO<sub>2</sub> laser welding |
| url | https://www.mdpi.com/1424-8220/22/13/4700 |
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