A Parylene-C Microplate Fabrication for Determining Cell Traction Forces
In order to study the CTFs in three-dimensional state, a Parylene-C microplate was fabricated on glass substrate by vapor deposition of Parylene-C film, and subsequent patterning by photolithography and etching using the micro-electromechanical systems (MEMS) technology. For Parylene-C etching proce...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Editorial Office of Journal of Taiyuan University of Technology
2021-11-01
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Series: | Taiyuan Ligong Daxue xuebao |
Subjects: | |
Online Access: | https://tyutjournal.tyut.edu.cn/englishpaper/show-501.html |