PMMA based compound kinoform lenses for sub-150 nm hard x-rays focusing

It is the first time to fabricate the polymethyl methacrylate (PMMA) based compound kinoform lenses (CKLs) for nano-focusing of hard x-rays. The PMMA CKLs with a physical aperture of 160 µm and a focal length of 20 mm are designed and fabricated by x-ray LIGA technology at the Beijing Synchrotron Ra...

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Bibliographic Details
Main Authors: Jing Liu, Yuanze Xu
Format: Article
Language:English
Published: AIP Publishing LLC 2023-10-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/5.0161129