PMMA based compound kinoform lenses for sub-150 nm hard x-rays focusing
It is the first time to fabricate the polymethyl methacrylate (PMMA) based compound kinoform lenses (CKLs) for nano-focusing of hard x-rays. The PMMA CKLs with a physical aperture of 160 µm and a focal length of 20 mm are designed and fabricated by x-ray LIGA technology at the Beijing Synchrotron Ra...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2023-10-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/5.0161129 |