Tunnel oxide passivating contact enabled by polysilicon on ultra-thin SiO2 for advanced silicon radiation detectors
Abstract Conventional silicon junction detectors encounter significant carrier recombination within the heavily doped p + and n + layers, as well as beneath the metal contact regions, creating the so-called “dead layers”, especially on the detector side. In this study, we present the tunnel oxide pa...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2024-07-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-024-68368-w |