Deep Learning: A Rapid and Efficient Adaptive Design Approach for Phase-Type Optical Needle Modulators

The radially polarized beams are modulated by phase-type optical needle modulators can be tightly focused to create needle-like focused beams, which are called optical needles. The use of optical needles with different resolutions and focal depths as direct writing heads for laser direct lithography...

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Main Authors: Simo Wang, Jiangyong Zhang, Fanxing Li, Jupu Yang, Jixiao Liu, Wei Yan
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9815511/
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author Simo Wang
Jiangyong Zhang
Fanxing Li
Jupu Yang
Jixiao Liu
Wei Yan
author_facet Simo Wang
Jiangyong Zhang
Fanxing Li
Jupu Yang
Jixiao Liu
Wei Yan
author_sort Simo Wang
collection DOAJ
description The radially polarized beams are modulated by phase-type optical needle modulators can be tightly focused to create needle-like focused beams, which are called optical needles. The use of optical needles with different resolutions and focal depths as direct writing heads for laser direct lithography enables periodic, cross-scale processing of high aspect ratio micro-nano structures with different line widths. The design of the phase-type optical needle modulators is the key to obtain optical needles with different resolutions and focal depths. However, the existing conventional methods for designing phase-type optical needle modulators rely on the physical model for generating optical needles and the defined fitness function, which makes their design time long and not adaptive. Based on the deep learning, a novel phase-type optical needle modulator design (PONMD) approach is proposed in this paper. The results show that the PONMD method takes 0.5526ms to design a phase-type optical needle modulator, and the similarity between the designed and target values is 96.73%. Compared with the conventional methods, the time consumption is reduced by about 8 orders of magnitude, and the similarity is improved by 11.19%. The PONMD approach has the advantages of adaptability, more efficient, less time-consuming, and less computational resource-consuming.
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spelling doaj.art-40954a6603674c289218f7ae81417ce82022-12-22T02:14:12ZengIEEEIEEE Photonics Journal1943-06552022-01-011441910.1109/JPHOT.2022.31883039815511Deep Learning: A Rapid and Efficient Adaptive Design Approach for Phase-Type Optical Needle ModulatorsSimo Wang0https://orcid.org/0000-0003-4082-4250Jiangyong Zhang1Fanxing Li2https://orcid.org/0000-0001-8374-8740Jupu Yang3Jixiao Liu4Wei Yan5https://orcid.org/0000-0002-5796-0569Institute of Optics and Electronics, Chinese Academy Sciences, Chengdu, Sichuan, China54th Research Institute of CETC, Shijiazhuang, ChinaInstitute of Optics and Electronics, Chinese Academy Sciences, Chengdu, Sichuan, ChinaInstitute of Optics and Electronics, Chinese Academy Sciences, Chengdu, Sichuan, ChinaInstitute of Optics and Electronics, Chinese Academy Sciences, Chengdu, Sichuan, ChinaInstitute of Optics and Electronics, Chinese Academy Sciences, Chengdu, Sichuan, ChinaThe radially polarized beams are modulated by phase-type optical needle modulators can be tightly focused to create needle-like focused beams, which are called optical needles. The use of optical needles with different resolutions and focal depths as direct writing heads for laser direct lithography enables periodic, cross-scale processing of high aspect ratio micro-nano structures with different line widths. The design of the phase-type optical needle modulators is the key to obtain optical needles with different resolutions and focal depths. However, the existing conventional methods for designing phase-type optical needle modulators rely on the physical model for generating optical needles and the defined fitness function, which makes their design time long and not adaptive. Based on the deep learning, a novel phase-type optical needle modulator design (PONMD) approach is proposed in this paper. The results show that the PONMD method takes 0.5526ms to design a phase-type optical needle modulator, and the similarity between the designed and target values is 96.73%. Compared with the conventional methods, the time consumption is reduced by about 8 orders of magnitude, and the similarity is improved by 11.19%. The PONMD approach has the advantages of adaptability, more efficient, less time-consuming, and less computational resource-consuming.https://ieeexplore.ieee.org/document/9815511/Optical needlesphase-type optical needle modulatorsdeep learninglaser direct lithographyhigh aspect ratio micro-nano structures
spellingShingle Simo Wang
Jiangyong Zhang
Fanxing Li
Jupu Yang
Jixiao Liu
Wei Yan
Deep Learning: A Rapid and Efficient Adaptive Design Approach for Phase-Type Optical Needle Modulators
IEEE Photonics Journal
Optical needles
phase-type optical needle modulators
deep learning
laser direct lithography
high aspect ratio micro-nano structures
title Deep Learning: A Rapid and Efficient Adaptive Design Approach for Phase-Type Optical Needle Modulators
title_full Deep Learning: A Rapid and Efficient Adaptive Design Approach for Phase-Type Optical Needle Modulators
title_fullStr Deep Learning: A Rapid and Efficient Adaptive Design Approach for Phase-Type Optical Needle Modulators
title_full_unstemmed Deep Learning: A Rapid and Efficient Adaptive Design Approach for Phase-Type Optical Needle Modulators
title_short Deep Learning: A Rapid and Efficient Adaptive Design Approach for Phase-Type Optical Needle Modulators
title_sort deep learning a rapid and efficient adaptive design approach for phase type optical needle modulators
topic Optical needles
phase-type optical needle modulators
deep learning
laser direct lithography
high aspect ratio micro-nano structures
url https://ieeexplore.ieee.org/document/9815511/
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AT fanxingli deeplearningarapidandefficientadaptivedesignapproachforphasetypeopticalneedlemodulators
AT jupuyang deeplearningarapidandefficientadaptivedesignapproachforphasetypeopticalneedlemodulators
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