A Method for Achieving Nanoscale Visual Positioning Measurement Based on Ultra-Precision Machining Microstructures

Microscopic visual measurement is one of the main methods used for precision measurements. The observation morphology and image registration algorithm used in the measurement directly affect the accuracy and speed of the measurement. This paper analyzes the influence of morphology on different image...

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Bibliographic Details
Main Authors: Yihan Chen, Honglu Li, Zijian Zhu, Chenyang Zhao
Format: Article
Language:English
Published: MDPI AG 2023-07-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/7/1444