A Novel Reconstruction Method to Increase Spatial Resolution in Electron Probe Microanalysis

The spatial resolution of electron probe microanalysis (EPMA), a non-destructive method to determine the chemical composition of materials, is currently restricted to a pixel size larger than the volume of interaction between beam electrons and the material, as a result of limitations on the underly...

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Bibliographic Details
Main Authors: Tamme Claus, Jonas Bünger, Manuel Torrilhon
Format: Article
Language:English
Published: MDPI AG 2021-07-01
Series:Mathematical and Computational Applications
Subjects:
Online Access:https://www.mdpi.com/2297-8747/26/3/51