Effects of Oxygen Partial Pressure and Thermal Annealing on the Electrical Properties and High-Temperature Stability of Pt Thin-Film Resistors
The effects of oxygen partial pressure and annealing temperature on the microstructure, electrical properties, and film adhesion of Pt thin-film resistors with Pt<sub>x</sub>O<sub>y</sub> as the adhesion layer were investigated. Pt/Pt<sub>x</sub>O<sub>y</...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
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| Series: | Chemosensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2227-9040/11/5/285 |