Cascaded 2D Micromirror with Application to LiDAR
This paper introduced a novel approach to enhance the vertical scanning angle of a large aperture 2D electromagnetic micromirror through the utilization of a cascaded torsional beam design. The primary objective was to increase the vertical scanning angle without compromising the robustness, which w...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-10-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/10/1954 |