Modeling the mechanical response of microelectromechanical system (MEMS)-based sensors to volatile alcohol vapors: A finite element analysis
The development of microelectromechanical system-based sensors, such as microcantilever sensors, has garnered considerable interest across various fields. Notably, there is a significant focus on the detection of volatile alcohol vapors, which holds promise in mitigating breath-related illnesses. Th...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2024-03-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0195105 |