Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO<sub>2</sub> and SO<sub>2</sub> in Their Mixtures

A gravimetric gas detection device based on surface functionalized Capacitive Micromachined Ultrasound Transducers (CMUTs) was designed, fabricated and tested for detection of carbon dioxide (CO<sub>2</sub>) and sulfur dioxide (SO<sub>2</sub>) mixtures in nitrogen. The create...

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Bibliographic Details
Main Authors: Dovydas Barauskas, Donatas Pelenis, Gailius Vanagas, Darius Viržonis, Jonas Baltrušaitis
Format: Article
Language:English
Published: MDPI AG 2019-07-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/19/14/3236