Formation and Dissolution of Mesoporous Layer during Metal-Particle-Assisted Etching of n-Type Silicon
Metal-assisted etching has attracted increasing attention as a method to produce porous silicon (Si). We previously found that gold (Au)-particle-assisted etching and platinum (Pt)-particle-assisted etching cause general corrosion of the Si substrate, but not in the case of silver (Ag)-particle-assi...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
The Electrochemical Society of Japan
2021-03-01
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Series: | Electrochemistry |
Subjects: | |
Online Access: | https://www.jstage.jst.go.jp/article/electrochemistry/89/2/89_20-65159/_pdf/-char/en |