In‐Plane AlN‐Based Actuator: Toward a New Generation of Piezoelectric MEMS
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley-VCH
2023-12-01
|
| Series: | Advanced Electronic Materials |
| Online Access: | https://doi.org/10.1002/aelm.202300721 |