Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators
Film bulk acoustic resonators (FBAR) are promising candidates to replace surface acoustic wave devices as filters or delay lines, but also offer exciting opportunities as biological or gas sensors. In this work, solidly mounted FBARs were manufactured by substituting commonly used pure aluminium nit...
| Үндсэн зохиолчид: | , , , , |
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| Формат: | Өгүүллэг |
| Хэл сонгох: | English |
| Хэвлэсэн: |
MDPI AG
2017-08-01
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| Цуврал: | Proceedings |
| Нөхцлүүд: | |
| Онлайн хандалт: | https://www.mdpi.com/2504-3900/1/4/305 |