High-precision positioning considering vibration and disturbance suppression in piezo-driven stage systems
This paper presents a controller design approach to compensate for the disturbances and achieve robust vibration suppression against variations in the resonant frequency in a piezo-driven stage system. Disturbances such as nonlinearities due to hysteresis and creep phenomena are inherent in piezoele...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2017-09-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/11/3/11_2017jamdsm0039/_pdf/-char/en |