Study by X-ray diffraction of the residual stress produced during deposition of TiN thin films on metallic substrates
The influence of film thickness and the substrate type on the level and type of residual stresses generated on TiN coatings are analyzed. Two different physical vapor deposition (PVD) techniques: Magnetron Sputtering and Ion Plating were applied. Two materials were used as substrate: stainless stee...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universidad de Antioquia
2010-01-01
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| Series: | Revista Facultad de Ingeniería Universidad de Antioquia |
| Subjects: | |
| Online Access: | https://revistas.udea.edu.co/index.php/ingenieria/article/view/14162 |