Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications

Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications

Highly flexible, electrically conductive freestanding graphene membranes hold great promise for vibration-based applications. This study focuses on their integration into mainstream semiconductor manufacturing methods. We designed a two-mask lithography process that creates an array of freestanding...

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Bibliographic Details
Main Authors: Millicent N. Gikunda, Ferdinand Harerimana, James M. Mangum, Sumaya Rahman, Joshua P. Thompson, Charles Thomas Harris, Hugh O. H. Churchill, Paul M. Thibado
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Membranes
Subjects:
graphene
photolithography
wet etching
variable capacitor
atomic force microscopy
critical point drying
Online Access:https://www.mdpi.com/2077-0375/12/5/533

Internet

https://www.mdpi.com/2077-0375/12/5/533

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