Fabrication and characterization of NiCr-based films with high resistivity and low temperature coefficient of resistance
As a metal alloy, NiCr films have a relatively high resistivity and low temperature coefficient of resistance (TCR) and are widely used in electronic components and sensors. However, the resistivity of pure NiCr is insufficient for high-resistance and highly stable film resistors. In this study, a q...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-06-01
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| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://dx.doi.org/10.1063/10.0017693 |