High-Density and Low-Crosstalk Multilayer Silicon Nitride Waveguide Superlattices With Air Gaps
High-density and low-crosstalk waveguide arrays are critical components in optical phased arrays (OPAs) and are widely used in solid-state light detection and ranging (LiDAR). In this work, silicon nitride waveguide superlattices with air gaps are proposed and analyzed theoretically. Mode analysis s...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2023-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9999312/ |