Development of Shape Prediction Model of Microlens Fabricated via Diffuser-Assisted Photolithography

Development of Shape Prediction Model of Microlens Fabricated via Diffuser-Assisted Photolithography

The fabrication of microlens arrays (MLAs) using diffuser-assisted photolithography (DPL) has garnered substantial recent interest owing to the exceptional capabilities of DPL in adjusting the size and shape, achieving high fill factors, enhancing productivity, and ensuring excellent reproducibility...

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Bibliographic Details
Main Authors: Ha-Min Kim, Yoo-Kyum Shin, Min-Ho Seo
Format: Article
Language:English
Published: MDPI AG 2023-11-01
Series:Micromachines
Subjects:
microlens array
diffuser-assisted photolithography
prediction model
photolithography
Online Access:https://www.mdpi.com/2072-666X/14/12/2171

Internet

https://www.mdpi.com/2072-666X/14/12/2171

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