Research on Surface Quality Difference of Microlens Array Fabricated by Fast Tool Servo Cutting

Freeform surface optical components have gained increasing attention in recent years, and higher requirements have been put forward for economical and efficient fabrication techniques. Single point diamond turning with fast tool servo is the method to process nonrotational symmetric surface with hig...

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Bibliographic Details
Main Authors: Yuetian Huang, Shijie Li, Jin Zhang, Chen Yang, Yingxiu Kong, Weiguo Liu
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9388860/