Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films

Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films

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In atomic force microscopes (AFM) a resonantly excited, micro-machined cantilever with a tip is used for sensing surface-related properties. When targeting the integration of AFMs into vacuum environments (e.g., for enhancing the performance of scanning electron microscopes), a tuneable Q-factor of...

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Bibliographic Details
Main Authors: Martin Fischeneder, Martin Oposich, Michael Schneider, Ulrich Schmid
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Sensors
Subjects:
electronically tuneable Q-factor
MEMS cantilever
peak shaping
AlN
piezoelectric
phase shifted excitation
AFM
vacuum
Online Access:https://www.mdpi.com/1424-8220/18/11/3842

Internet

https://www.mdpi.com/1424-8220/18/11/3842

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