Optimization of Au:CuO Thin Films by Plasma Surface Modification for High-Resolution LSPR Gas Sensing at Room Temperature

Optimization of Au:CuO Thin Films by Plasma Surface Modification for High-Resolution LSPR Gas Sensing at Room Temperature

In this study, thin films composed of gold nanoparticles embedded in a copper oxide matrix (Au:CuO), manifesting Localized Surface Plasmon Resonance (LSPR) behavior, were produced by reactive DC magnetron sputtering and post-deposition in-air annealing. The effect of low-power Ar plasma etching on t...

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Bibliographic Details
Main Authors: Manuela Proença, Marco S. Rodrigues, Diana I. Meira, M. Cidalia R. Castro, Pedro V. Rodrigues, Ana V. Machado, Eduardo Alves, Nuno P. Barradas, Joel Borges, Filipe Vaz
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Sensors
Subjects:
plasmonics
thin films
Au nanoparticles
nanostructural evolution
high-resolution LSPR spectroscopy
optical gas sensing
Online Access:https://www.mdpi.com/1424-8220/22/18/7043

Internet

https://www.mdpi.com/1424-8220/22/18/7043

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