The influence of the physicochemical nature of the components of the V2O5/GaAs, MnO2/GaAs, V2O5/InP, MnO2/InP, TiO2/InP, and SnO2/InP heterostructures and the oxidation conditions on the surface morphology of the synthesised films
The formation of oxide functional films on the surface of semiconductors is a serious technological challenge, which is even more complicated in the nanometre thickness range. It is necessary to form films with specified values of thickness, resistivity, and a certain surface morphology for practic...
Asıl Yazarlar: | , , , , , , , |
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Materyal Türü: | Makale |
Dil: | English |
Baskı/Yayın Bilgisi: |
Voronezh State University
2022-03-01
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Seri Bilgileri: | Конденсированные среды и межфазные границы |
Konular: | |
Online Erişim: | https://journals.vsu.ru/kcmf/article/view/9053 |