Investigation of teos hydrolytic polycondensation in the synthesis of gas-sensitive films for a semiconductor carbon (II) oxide sensor
This paper discusses the study of theos hydrolytic polycondensation in the synthesis of gas-sensitive films for a semiconductor carbon (II) oxide sensor. As a result of the our experiments, the composition and proportions of the components for the synthesis of gas sensitive materials for semiconduct...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2024-01-01
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| Series: | E3S Web of Conferences |
| Online Access: | https://www.e3s-conferences.org/articles/e3sconf/pdf/2024/04/e3sconf_icite2023_01021.pdf |