A nanoforest-based humidity sensor for respiration monitoring
Abstract Traditional humidity sensors for respiration monitoring applications have faced technical challenges, including low sensitivity, long recovery times, high parasitic capacitance and uncalibrated temperature drift. To overcome these problems, we present a triple-layer humidity sensor that com...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2022-04-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-022-00372-4 |