Manufacturing of Complex Silicon–Carbon Structures: Exploring Si<sub>x</sub>C<sub>y</sub> Materials

This paper reports on the manufacturing of complex three-dimensional Si/C structures via a chemical vapor deposition method. The structure and properties of the grown materials were characterized using various techniques including scanning electron microscopy, aberration-corrected transmission elect...

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Bibliographic Details
Main Authors: Skyler Oglesby, Sergei A. Ivanov, Alejandra Londonõ-Calderon, Douglas Pete, Michael Thompson Pettes, Andrew Crandall Jones, Sakineh Chabi
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/15/10/3475