EFFECT OF PLASMA TREATMENT ON THE SURFACE COMPOSITION OF SAPPHIRE
The plasma treatment of the surface of sapphire was performed. The composition of the sapphire surface before and after plasma treatment by X-ray photoelectron spectroscopy (XPS) is discussed.
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | Russian |
Published: |
Tver State University
2015-11-01
|
Series: | Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов |
Subjects: | |
Online Access: | http://physchemaspects.ru/archives/2015/%D0%A4%D0%A5-2015%20%D0%9D%D0%B0%D0%B3%D0%B0%D0%BF%D0%BB%D0%B5%D0%B6%D0%B5%D0%B2%D0%B0%20%D0%A0%D0%A0.pdf |