EFFECT OF PLASMA TREATMENT ON THE SURFACE COMPOSITION OF SAPPHIRE

The plasma treatment of the surface of sapphire was performed. The composition of the sapphire surface before and after plasma treatment by X-ray photoelectron spectroscopy (XPS) is discussed.

Bibliographic Details
Main Authors: R.R. Nagaplezheva, A.M. Karmokov, B.N. Nagoev, M.M. Uyanaeva, V.K. Luev
Format: Article
Language:Russian
Published: Tver State University 2015-11-01
Series:Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов
Subjects:
Online Access:http://physchemaspects.ru/archives/2015/%D0%A4%D0%A5-2015%20%D0%9D%D0%B0%D0%B3%D0%B0%D0%BF%D0%BB%D0%B5%D0%B6%D0%B5%D0%B2%D0%B0%20%D0%A0%D0%A0.pdf